基于位相测量偏折术的在线高精度高分辨波前检测方法与关键技术

波前检测在许多领域如精密加工与制造、光学元件面形、波前像差和流场密度分布等应用中都有十分重要的价值。由于位相测量偏折术具有系统简单成本低、高灵活性、检测动态范围大、精度高且受环境影响小等优点而备受关注。我们在位相测量偏折术的高精度波前检测研究中发现，其基于摄影测量学原理的检测数理模型、相机标定方法、以及检测中高度混淆问题的解决方法还存在缺陷，导致其检测精度难以提高。为此，在哈特曼波前检测原理的基础上，本项目将开展基于成像镜头入瞳的位相测量偏折术波前检测数理模型、相机及视线标定方法、解决高度混淆问题的待测元件被测点位置参数高精度获取方法、以及相应的高精度高分辨波前重建及数据处理方法的研究，为川内大科学装置中复杂环境下的大口径凸非球面光学元件加工、倍频晶体装校及风洞流场密度分布的在线定量检测的技术急需，提供一种切实可行的高精度高分辨波前检测方法和手段，并建立相应的原理样机和软件平台。

Waveferont testing has a lot of important applications in many fields such as precise fabrication and manufacture, optics testing, wavefront aberration and measurement of the density distribution of flow etc. Due to the merits of a simple and low-cost, highly flexible, insensitive to environments, high dynamics and high accuracy optical test, the PMD(Phase Measuring Deflectometry) has been widely used for almost all specular surface or lens system. During our past work with PMD, we have noticed that the accuracy of measurement is hard to be further improved when the theory of photogrammetry is adopted for PMD, of which the traditional camera calibration method and the method for eliminating the height ambiguity issue has critical defects. Therefore, based on the principle of Hartmann screen testing, we propose that the theory for PMD on the basis of entrance pupil of imaging lens and the method of visual ray calibration will be researched at first. Secondly, the method by eliminating the height ambiguity issue to achieve the position coordinates of tested points on a surface with high accuracy will be proposed. Moreover, a theory for slope data processing and wavefront reconstruction with high accuracy and high resolution will be put forward. By these researches mentioned above, it will provide a practical way for the large scientific facilities in Sichuan province to measure the surface error with high accuracy and high resolution for an on-line convex aspheric element with large aperture in fabrication process, the surface deformation measurement of an on-line KDP/DKDP crystals element in alignment process and to quantify the density distribution of flow in tunnel. Finally, two prototypes with software platforms for validating our proposal about the aspheric optics fabrication process control and about the alignment of an optical crystal plate with a large aperture will be constructed, and a method for visualization of supersonic flows in shock tunnels will be put forward too.