MOEMS微镜近红外光谱仪是一种可用于农产品、医药、食品品质快速无损检测的光学仪器。本项目拟在申请人前期MOEMS微镜红外光谱仪研究基础上，对MOEMS微镜近红外光谱仪的光谱扫描成像技术做进一步深入研究。具体内容包括：通过理论分析和计算光谱像平面离焦量与平行光束在光栅上扫描幅度之间的定量关系，求解达到光谱分辨率要求时平行光束在光栅上的移动限，研究宽光谱范围、高光谱MOEMS微镜近红外光谱仪的实现方法和途径；将计算机图形学、有限元分析、变形网格算法相结合，研究MOEMS微镜结构参数-转速-惯性力间关系的耦合动力学模型；通过MOEMS微镜的动态变形特性模拟分析及实验测试工作，建立MOMES微镜结构参数和动态变形间的定量关系模型，求解达到近外光谱仪使用要求的MOEMS微镜结构参数。最终，本项目将实现光谱范围1000-1800nm，分辨率不大于10nm的MOEMS微镜近红外光谱仪光谱成像技术。

MOEMS micro-mirror based NIR spectrometer is an optical instruments that can be used for rapid and non-destructive testing in agricultural, pharmaceutical and food quality. Based on the preliminary studies of the MOEMS micro-mirror spectrometer, the applicants intends to do further research on the spectroscopic imaging scanning technology. Specific studies include:. Through theoretical analysis and calculation of the quantitative relationship between spectral image plane defocus amount and sweep amplitude of parallel beam on grating surface, to solve the movement limit of parallel beam on the grating when resolution in meeting the requirements of design, study the impementation methods and means of a wide spectral range, high sepctral resolution NIR spectrometer that based on MOEMS micromirror.. Combinating the computer iconology, finite element analysis and deformation meshing algorithm, to study the coupled dynamic model of the relationship between MOEMS micromirror structural parameters, rotation speed and ineria force.. Establishing a quantitative relationship model between MOEMS micro-mirror structural parameters and the dynamic deformation of the mirror surface by the dynamic deformation characteristics simulation analysis and experimental testing of the MOEMS micro-mirror, solving the structural parameters of the MOEMS micro-mirror that meet the requirements of NIR spectrometer.. Finally, the project will realize the imaging technology that spectral range 1000-1800nm, resolution is not greater than 10nm for the MOEMS micro-mirror based NIR spectrometer..