针对软脆材料加工过程中易产生划痕、凹坑、磨粒嵌入等表面损伤，提出一种基于空化效应的软脆材料加工新方法：利用空化装置使加工区域的水基加工液发生空化。所形成的空泡溃灭在加工液中产生微射流、冲击波和OH-氧化自由基。微射流和冲击波以机械作用的形式反复作用，在工件表面形成厚度极小的疲劳破坏层，OH-氧化自由基与工件表面发生化学反应生成氧化层，利用机械-化学作用协同对工件材料进行去除，实现软脆材料高效、低损伤加工。由于加工过程中不使用磨料，避免了工件表面划痕、磨粒嵌入等损伤，并减少了对环境的污染。本项目研究揭示加工过程中空化机理，分析空化效应下空泡流和空化流场的动力特性和分布规律，研究加工过程中的工件材料去除机理，探索空化效应定量控制的关键因素和方法，构建加工实验平台，优化加工方式及工艺参数，发展一种高效、高质量、低成本的加工新方法，对丰富精密超精密加工技术具有重要的科学意义和工程应用价值。

A novel machining method that is based on cavitation effect for soft-brittle material is proposed to tackle with some defects such as scratches, pits, abrasive embedded on material surface. The novel method employed the cavitation equipment to induce cavitation in water-based machining fluid. When the bubbles collapse, there are mico-jet streams, impinging waves, OH- oxidative free radicals are produced in machining fluid.The micro-jet streams and impinging waves have effects on the wafer surface in type of mechanical action and generated a layer of fatigue failure; The OH- oxidative free radicals have chemical reaction with the material surface and generated a layer of oxides. The type of mechanical action together with the type of chemical action have effects on the wafer materials surface are realized high-effective and low-damage machining of soft-brittle materials. There is no brasive in machining fluid, the scratches and abrasive embedded are escaped on the material surface and decreased the environmental pollution.The project exposed the cavitation mechanism in processing, analyzed cavitation bubbles flow and cavitaion flow field dynamic property and distribution rule, studied the wafer material remove mechanism in processing, explored the key factors and methods of quantitative control of cavitation effect. The experimental machining platform is built with which optimize machining techniques and processing parameters. The project develop a novel machining method with high efficiency , low cost and high quality surface, which has scientific sense and engineering application value in enriching machining technology with precision and ultra-precision machining .