针对目前微镜驱动方式存在的电磁噪声干扰等问题，本项目基于PLZT致动器具有的绿色驱动和直接驱动的特点，对微镜实施光控非接触式驱动与控制。通过对PLZT光致形变影响因素研究、迟滞分析，修正和完善光致伸缩数学模型；对三种构型PLZT致动器驱动机理进行研究，提出一种快速消除残余光致应变的方法；建立双晶片构型在双光源ON/OFF交替激励下的数学模型；并推导Rainbow构型在光照下的等效驱动力；基于PLZT致动器设计一种具有平移及旋转自由度的光控非接触式微镜驱动装置，并建立微镜在平移及旋转状态下的光电热力耦合数学模型；针对PLZT光致响应的非线性、迟滞性和复杂性，采用光源激励策略与控制算法相结合的方式，确定适合光控非接触式微镜驱动系统的控制策略，并利用仿真与实验验证该控制策略的有效性。本项目提供一种新型的微镜驱动方式，可完善PLZT的光致形变理论，推动PLZT在微驱动与智能结构领域的应用。

To solve the problem of electromagnetic interference of micro-mirror driven, the optical drive and non-contact control of the micro-mirror is studied based on the green drive and direct drive characteristic of PLZT actuator in this project. With influencing factor research and hysteresis analysis of photodeformation of PLZT, the photostrictive mathematical model is revised and improved. The driven mechanism of three configurations of PLZT actuator is studied. A method which can eliminate residual strain rapidly is presented for monilithic actuator. The mathematic model of bimorph actuator illuminated by two light sources with ON/OFF alternative actuation is established. The equivalent driving force of Rainbow actuator irradiated with light is deduced. The light-driven apparatus which has movement and rotation mode for micro-mirror is designed based on the PLZT actuators. The mathematic models with light-electric-temperature-elastic field coupling are established for the micro-mirror's movement and rotation mode. Suitable control scheme for the optical and non-contact drive system is obtained through combining the illumination method and the control algorithm, considering the nonlinear, hysteretic and complicated characteristic of photo-induced response of PLZT. The effect of control scheme is validated with simulation and experiment. In this project, a novel drive method for micro-mirror is presented. And the photodeformation theory of PLZT is improved. The application of PLZT in micro-driven and smart structure is promoted.