掺杂类金刚石（DLC）薄膜的微结构与其光电性能的定量关系研究

DLC薄膜因具备优异的机械、光电等诸多特性，是替代传统透明导电ITO薄膜的理想材料之一。DLC微结构中sp2杂化碳被认为主导了其光电性能，因此微结构的有效定量分析是研究其光电特性的关键。由于DLC微结构中碳的杂化形式和氢的定量分析缺乏研究，目前DLC薄膜仍未实现透明导电的有机统一。元素掺杂是调控DLC薄膜微结构的有效方法，本项目采用磁控溅射和微波等离子CVD技术，选择典型的碳化物形成元素（W，Nb等）和半导体掺杂（B，N等）元素，通过控制掺杂组元和参数获得所需含氢/非氢DLC薄膜。然后利用近边X射线吸收精细结构、卢瑟福背散射/弹性反冲分析等方法，实现传统分析手段未能达到的掺杂DLC薄膜微结构的定量分析。从而，揭示元素掺杂对DLC薄膜微结构的影响规律，确定DLC薄膜的微结构与光电特性间的定量关系，实现预设光电特性DLC薄膜的可控制备，为发展DLC薄膜的透明导电性能奠定理论与实验基础。

Diamond-like carbon (DLC) film is one of the ideal materials to replace the traditional transparent conductive ITO film, because of it's excellent mechanical, photoelectric and other properties. The microstructure of sp2 is considered to dominate its photoelectric properties of DLC films, so that the effective quantitative analysis of its microstructure is the key to study their photoelectric properties. Due to the lack of research on the quantitative analysis of different hybrid forms of carbon and the presence of hydrogen in the microstructure of DLC films, DLC film has not yet achieved the unification of transparent conductivity. Element doping is considered to be an effective way to regulate the microstructure of DLC film, in this project, magnetron sputtering and microwave plasma enhanced CVD deposition techniques will be used to obtain the necessary hydrogen/non-hydrogen DLC films by controlling the doping components (typical carbides forming elements such as W, Nb and semiconductor-doped nonmetallic B, N, etc.) and parameters. The near edge X-ray absorption fine structure, Rutherford backscattering/Elastic recoil detection analysis, and other analytical methods will be used to quantitatively analyze the microstructure of doped DLC films that cannot be achieved by traditional analytical methods. Then, we can reveal the effect of elemental doping on the microstructure, determine the quantitative relationship between the microstructure and photoelectric properties, and realize the controllable preparation of DLC films with preset photoelectric properties. These results will lay a theoretical and experimental foundation for the development of transparent conductive properties of DLC films.