MEMS技术是发展高性能微传感器的一条有效途径。MEMS/GMR集成磁传感器较GMR本身的主要性能指标可提升2-3个量级，但稳定性问题严重制约了其实用化。本项目以MEMS/GMR集成磁传感器为对象，深入研究基于软磁微结构振动的传感器数学模型、能耗机理及其热作用规律、MEMS驱动结构低能耗设计、局域温度场梯度平滑以及环境扰动和能耗热作用的补偿控制等内容，重点解决传感器能耗机理、非均匀热应力分布规律及其对MEMS结构振动的影响等关键科学问题，突破集成磁传感器多物理场分析、振幅闭环控制和关键结构高精度对准等关键技术，揭示集成磁传感器中非均匀热应力对MEMS驱动结构的影响规律，提出一种定向热传导的局域温度场梯度平滑方法，并最终建立一套较为完善的集成磁传感器稳定性提升新方法，为增强集成磁传感器的实用性提供有力支持，同时也为其他MEMS传感器研究提供重要指导。

MEMS technologies are effective approaches for developing high performance micro-sensors. The integration technology of MEMS/GMR magnetic sensors will improve the GMR performance by 2-3 orders, but the applications of the integrated magnetic sensors are severely restricted by their unstability. This program will focus on MEMS/GMR magnetic sensors and deeply investigate the subjects including the mathematical model of the integrated magnetic sensor based on the vibration of the soft magnetic micro structures, the energy dissipation mechanism and its heat effect law, low power-consuming designs of the MEMS driving structures, local thermal field smoothing and the compensation of the environmental disturbance and the heat effect from energy dissipation, and mainly solve the key scientific problems including the energy dissipation mechanism, non-uniform distribution regularity of the thermal stress and its effect on the vibration of MEMS structures, and master the technologies including multi-field analysis of MEMS driving structures, closed-loop control of the vibration amplitude and the high precision alignment of the sensor key components, uncover the influence law of non-uniform thermal stress on the MEMS driving structures of the integrated magnetic sensors, present a smoothing method for local thermal field gradient with targeted thermal conduction, and finally build a set of methods for improving the stability of integrated magnetic sensor, to provide theory and technology supports for the practicability of the MEMS/GMR magnetic sensors and to provide important guidances to the research on other MEMS sensors.