基于全固态光冷MEMS系统的加速度精密测量研究

高机动性装备的大量应用对惯导系统的研制提出了新的要求，以实现高灵敏度大带宽的惯性信号测量。全固态MEMS系统因其在集成度、功耗和成本等方面的独特优势而在加速度等惯性信号的测量中有着广泛应用。特别是受近年来腔光力学研究的推动，高灵敏度光学读出技术的使用为MEMS加速度计的发展提供了新的动力。尽管如此，目前光学读出MEMS加速度计的测量带宽和灵敏度由于受到热振动噪声的限制依然难以满足高机动性装备高精度导航的需求。为此，本项目拟开展基于全固态光冷MEMS系统加速度精密测量的研究。研究基于微腔光力系统的加速度计构造方法；重点是在微腔光力加速度计中进一步发展机械振子的高效光学冷却技术，突破加速度测量的热振动噪声瓶颈；并研究光学冷却条件下加速度的精密测量方法，在全固态光冷MEMS系统中实现加速度的高灵敏度大带宽精密测量；解决全固态MEMS加速度计在高机动性装备高精度惯性导航应用中的关键科学问题。

The rapid deployment of maneuverable equipment put new requirements on developing inertial navigation systems to satisfy high-sensitive measurement of inertial signals at a large bandwidth. Solid-state MEMS systems, for its unique advantages on integration, power consumption, and cost, have been widely used in the measurement of inertial signals such as acceleration. Specifically, benefitting from recent advances on cavity optomechanics, development of MEMS accelerometer gains new momentum from the application of high-sensitive optical readout techniques. Nevertheless, the realization of high-accurate inertial navigation for maneuverable equipment is still of great challenge for optical-readout MEMS accelerometers because thermal mechanical noise imposes a fundament limit on the bandwidth and the sensitivity that can be obtained. In this proposal, we plan to carry out studies on high-precision measurement of acceleration in an optically cooled solid-state MEMS system. The construction of accelerometer based on a micro-cavity optomechanical system will be studied. Special emphasis will be placed on further developing of high-efficient optical cooling technique in the micro-cavity optomechanical accelerometer in order to overcome the limitation imposed by the thermal mechanical noise on the measurement of acceleration. And the scheme for high-precision measurement of acceleration in presence of optical cooling will be investigated in order to realize high-sensitive measurement of acceleration at large bandwidth using the optically cooled solid-state MEMS system. This proposal is expected to solve the key scientific problem in high-accurate inertial navigation for maneuverable equipment using solid-state MEMS accelerometer.