近年来介质阻挡放电(DBD)等离子体技术正逐步应用于诸多领域，然而如何实现适合实际应用的大气压均匀DBD等离子体、如何界定大气压DBD等离子体的均匀性，仍然是目前国内外研究的难点和热点。本项目以平行平板电极结构的DBD为研究对象(阻挡介质：自制可加工陶瓷（或不同陷阱的材料）；气体氛围：纯Ar、Ar与少量NH3或C2H4混合气体)，采用表面微观分析、光电联合诊断等手段，实验研究阻挡介质的电荷陷阱特性和混合气体的彭宁效应对等离子体放电电压、粒子成分、粒子浓度及放电均匀性的影响；建立单一Ar及混合气体氛围中大气压DBD等离子体的物理模型，仿真研究在不同气体种类和气体比例时等离子体粒子浓度、电场强度、放电模式的动态演化过程；进而借助实验及仿真分析探讨均匀放电产生的机理。本项目旨在明确影响DBD等离子体均匀性的物理机制、提出产生均匀DBD等离子体的新方法，为DBD用于薄膜材料精细表面改性和生物细胞处理等提供技术支持。

Dielectric barrier discharge (DBD) plasmas are recently applied to many fields. However, two problems that how to realize an atmospheric pressure uniform DBD plasma suitable for practice application and how to judge the uniformity of DBD plasma, are now the difficulty and the focus in the world. In the project, the DBD with parallel plate electrode configuration is regarded as research object (barrier dielectric: machinable ceramics (or the material with different traps), work gas: pure argon, the mixture of argon and a spot of ammonia or ethene). In experiment, the effects of charge trap property of the barrier dielectric and the Penning effect of mixture gas on the particle component and density, discharge voltage and current as well as uniformity of DBD plasma are researched by using the methods of surface micro-analysis and photoelectric combination diagnosis and so forth. Furthermore, a fluid physical model of atmospheric pressure DBD plasma in pure Ar and mixture gas is proposed. The discharge mode transition, the spatial and temporal distributions of charged and neutral particle density as well as space electrical field strength are further obtained under different gases and proportions. Based on experiment and simulation analysis, the mechanism of uniform discharge is in-depth investigated. The aims of this project are to clarify the effect mechanism of trap property and Penning effect on the uniformity of DBD plasma and put forward a new method to generate uniform DBD plasma. This work is to provide technical support for the DBD plasma used to fine surface modification of thin film material and treatment of biomedical cells.