基于可移动沉积源的大口径光学薄膜动态沉积方法机理研究

随着大口径光学元件的尺寸不断增大，国外最大单镜尺寸达到8m量级，国内也已经达到4m量级，各种更加复杂的自由曲面甚至共体光学元件也不断的出现在大口径光学系统中，大口径光学薄膜沉积技术作为大口径光学系统中性能的重要影响因素之一，将面临着巨大的挑战。本项目提出一种基于磁控溅射移动沉积源的大口径动态沉积方法，相较于传统大口径光学薄膜沉积方案，可根据面形进行沉积规划，得到相应的沉积方案，对于大尺寸的中心无孔光学元件和大尺寸非回转对称光学元件如多面共体光学元件等传统沉积方法在膜层均匀沉积上的疑难问题提供了全新的解决思路。在面对未来更大尺寸，设计更加复杂多样的大口径光学元件时，基于可移动沉积源的大口径光学薄膜动态沉积方法具有更高的效率、更加良好的适应性及更大的应用前景，具有重要的现实需求和应用研究意义。

As the size of large-aperture optical components continues to increase, the largest single lens size abroad reaches the order of 8m, and the domestic level has also reached the order of 4m. Various more complex freeform surfaces and even common optical components have also continuously appeared in large-aperture optics. In the system, the large-aperture optical film deposition technology, as one of the important factors affecting the performance of the large-aperture optical system, will face huge challenges. This project proposes a large-aperture dynamic deposition method based on a magnetron sputtering mobile deposition source. Compared with the traditional large-aperture optical film deposition scheme, the deposition planning can be carried out according to the surface shape to obtain the corresponding deposition scheme. For large-sized centers Traditional deposition methods such as non-porous optical elements and large-scale non-rotationally symmetric optical elements such as multi-sided common optical elements provide a new solution to the problem of uniform deposition of the film layer. In the face of larger sizes in the future and more complex and diverse large-aperture optical components, the large-aperture optical film dynamic deposition method based on the movable deposition source has higher efficiency, better adaptability and greater application prospects. It has important practical needs and application research significance.