目前，环境、安全、气象、空间探测、无人机载气体分布探测、军事分析、刑事技术以及反恐防化等诸多领域对微型傅里叶变换红外光谱仪(μFTIR)提出了十分迫切的需求。为解决传统光学元件体积、重量大，无法与微器件匹配而实现FTIR微小型化的瓶颈问题，本项目在前期研究的基础上，首次提出一种基于MOEMS器件和微光学元件的空间调制μFTIR。拟对该光谱仪进行微型化理论及关键技术研究，包括像差校正、光均匀化及噪声抑制等理论问题，微光学设计、微器件制作及红外微系统的一体化集成技术等，着重解决MOEMS器件与微光学元件的设计与制作中的关键科学与技术问题，并通过搭建μFTIR实验平台对研究结果进行验证。该系统通过MOEMS轻型分束器实现光场的分束，由微光学元件实现系统的准直与聚焦功能，不仅体积小、重量轻，而且具有高稳定性和可靠性。本研究的结构和方法在国际上未见报导，具有自主知识产权（已申报国家发明专利）。

Currently, urgent requirement for micro Fourier transform spectrometers (μFTS) emerges from a wide range of fields, including environmental detecting, security, weather broadcasting, spatial exploration, unmanned aerial vehicle-borne distributed gas investigation, military analysis, criminal detecting, and unti-terrorism. Basing on pre-researches, this project is firstly proposed a MOEMS and micro optical elements based spatially modulated μFTS, in order to solve problems of the incompatibility between traditional optical elements with large size and weight and the other micro components, thus to realize the minimization of FITR. Theories about minimization and key technologies, such as correction of aberrations, light field uniformity, noise depression, micro optics design, and the integration of infrared system are planned to undertake within the project. Endeavors would be spent to solve problems the design of MOEMS and micro optics, and the core science and technology of their fabrication. Research achievements would be verified by establishing the FTS platform. By introducing the light weight beam splitter to realize light beam splitting, and by utilizing micro optical elements to achieve the system collimation and focusing function, the μFTS system gains not only the advantages of small volume and light weight, but also the high stability and reliability. Similar structure and fabricating method has not yet been reported in the internationally, and we hold the independent intellectual property rights. It has been declared for national invention patents.