超导转变边沿（TES）探测器是一种极端灵敏的光子探测器。相比与其它软X射线波段的探测器，其突出的性能优势是兼具高探测效率与高能量分辨率。目前国际上最好的TES探测器在5.9keV可以达到接近1.6eV的能量分辨率，比常用的半导体探测器要高出一个数量级以上。因此TES探测器是未来空间X射线波段天文观测等领域首选的探测器件。本项目在国际上率先提出使用铝锰（AlMn）合金超导薄膜来制备软X射线波段的TES器件。AlMn合金超导薄膜比较目前常用的双金属超导薄膜，具备制备工艺简单，超导转变温度与薄膜厚度参数独立（方便器件设计）等优势。为发展基于AlMn合金的软X射线TES探测器，我们需要解决两个关键科学问题：Mn原子掺杂对AlMn合金超导薄膜物性影响和对TES探测器噪声特性影响。我们计划基于实验室已有超导微纳加工平台，完成AlMn合金超导薄膜关键物性研究和X射线TES探测器研制。

Superconducting transition edge sensor (TES) is an extreme sensitive photon detector. Compared to other detectors in soft X-ray band, The TES detectors are capable of high detection efficiency and energy resolution. The best TES energy resolutions achieved to date are 1.6 eV FWHM（Full Width at Half Maximum）with incident photon energy ~ 5.9 keV, which is one order of magnitude better than the energy resolution of semiconductor detectors. Therefore TES is the primary candidate for future space X-ray observation. We propose to use AlMn-alloy film to fabricate TES devices for X-ray detection. Compared to currently used bilayer of noble metal superconducting films, AlMn-alloy film is a single-layer film and its superconducting transition temperature is independent of the film thickness, which may greatly simplify the design and the fabrication of the devices. To develop TES based on AlMn alloy，two of the most crucial technology will be investigated in this project, namely effect of doping Mn on AlMn alloy superconducting thin films characterization and the TES detectors noise performance. We intend to study the AlMn alloy characterization and develop the TES detectors for X-ray detection in our own superconducting micro-nanofabrication lab.