微机电系统中由器件表面间距减小而导致的Casimir引力增大会引起器件粘着失效，限制其向更小尺度发展。本课题拟开展新型电磁功能表面及其Casimir斥力的电磁调控机理研究。由Lifshitz理论和散射矩阵理论出发，研究不同类型电磁响应色散介质对Casimir力的影响规律，探索新的Casimir斥力实现机理与方法；利用电磁超-超常介质（Meta-metamaterial）的设计理论，结合EMG理论和扩展Onsager理论等，研究超顺磁纳米颗粒的形状、大小、电磁参数和填充率等对电磁功能表面有效电磁参数的影响规律，探索满足Boyer条件的新型功能表面的设计与实现方法；研究电磁功能表面组成基元的磁化状态随外磁场的响应特性，揭示其外场调控Casimir引力与斥力转变的机理；采用微纳加工与自组装方法构建MEMS摩擦副，并验证其电磁调控特性。该研究为改善MEMS器件的粘着失效与摩擦主动控制提供了可能。

The influence of Casimir force increases as the separation between two surfaces in Microelectromechanical Systems (MEMS) decreases, which limits the miniaturization of the MEMS due to the cause of adhesion failure. To solve this problem, we focus on the research of controllable Casimir repulsion by using a novel designed electromagnetic surface. The influence on Casimir force of materials with different electromagnetic response styles (Drude/Lorentz model etc.) as well as the contribution of electromagnetic parameters on different frequency ranges are discussed based on Lifshitz and scattering theory, according to which the new theory and methods to realize controllable Casimir repulsion are studied; Using the designing theory of meta-metamaterials in combination with the Extended Maxwell-Garnett theory (EMG), Extended Onsager's theory and Clausius-Mossotti theory (CM), we will explore the influence on effective electromagnetic parameters of the electromagnetic surface by the dimension, shape, electromagnetic parameters, filling fraction and spatial orientation of nano superparamagnetic particles, and explore the design and realization of new electromagnetic surface with a broadband and high frequency magnetic response satisfying Boyer's condition. We will discuss the variation in magnetization state of the constituent unit (superparamagnetic particles) of the electromagnetic surface with external magnetic field, in order to reveal the mechanism of the reversible transition between Casimir attraction and repulsion controlled by an external magnetic field. Finally, we will construct the MEMS friction pair by micro-nano processing in combination with self-assembly method and validate the realization of controllable Casimir repulsion. The research provides a new effective method to imporve the adhesion failure and active controll friction in MEMS.