基于柔性衬底调控的金属微纳结构制备、特性和应用研究

基于柔性衬底的功能器件具有独特优势，成为国际上迅速发展的热点研究领域。随着当前器件高度集成化的需求，基于柔性衬底的亚微米、纳米尺寸的功能微纳结构制造技术、特性及功能器件应用的研究仍亟待开展。申请者近期研究发展了金属薄膜辅助结构转移与衬底调控相结合的技术，在柔性衬底上初步实现了传统手段难以制备的数种2D/3D微纳结构。本项目拟以该技术为基础，研究衬底宏观调控对微观2D/3D金属微纳结构应力、形变和体系光学性质等的影响及其机制。基于这些机制，制备窄间隙金属微纳结构，进一步结合转移技术，将2D平面“热点”扩展到3D空间，实现均匀高效的单分子检测；探索单层平面结构组建3D结构的机理，研究在3D微纳结构在光学天线和传感器上的应用；设计和制备柔性衬底上电操控的2D和3D金属微纳结构，实现在新型结构微纳光电器件上的应用。本项目的研究将为柔性微纳器件提供多种光电元件的理论设计、制备和应用支持。

Functional devices based on flexible substrates have unique advantages and become a rapid development and hot research field in the world. With the demand of highly integrated devices, the fabrication, characterization and application of submicron/nanometer-sized functional structures on flexible substrate are urgently needed. In our recent researches, we developed a technology that combining metal-assisted structure transfer with substrate manipulation, and we preliminarily achieved a number of 2D/3D micro-nano structures on flexible substrate which are difficult to be prepared by traditional means. This project will be carried out based on this technology. We will study the mechanisms of manipulation of the substrate in macroscopic on the stress, and results in deformation and optical properties of 2D/3D metallic micro-nano structures in microscopic. Then, based on these mechanisms and transfer technique, we will fabricate metallic nanostructures with narrow gaps, and expend the 2D plane "hot spots" to 3D space for achieving uniform and efficient single-molecule detection. The mechanism of constructing 3D structure with single-layer planar structure will be explored, and the application of 3D micro-nano structures on optical antenna and sensor will be investigated. Finally, design and fabrication of electrically operated 2D and 3D metallic micro-nano structures on flexible substrates will be carried out for realization of new structured micro-nano optoelectronic devices in future flexible device application. In this project, it will provide theoretical design, preparation and application support of a variety of photoelectric elements for flexible micro-nano devices.