用于AFM高速成像和力学性能测量的自阻尼超快Z轴系统设计与控制

为实现深层次微纳力学性能研究，本项目针对AFM在面向高效力学性能测量时面临的Z轴微力控制带宽有限、高频探针加载位置精度不足及多轴复杂动态交叉耦合特性难题开展关键技术研究，从驱动传感控制整体系统设计出发，构建自阻尼超快Z轴系统，辅以多轴解耦控制思路形成面向“AFM高速成像”+“AFM高效力学性能测量”的超快高精度扫描新方法。具体内容包括：（1）自感知超快Z轴设计与集成；（2）宽频域Z轴自阻尼微力/探针位置控制方法；（3）鲁棒多轴动态交叉耦合补偿方法；（4）面向高效AFM成像及力学性能测量实验研究。预期建立宽频域内多控制参数综合方法，研制自阻尼超快Z轴，设计三轴鲁棒交叉耦合控制新方法，实现频带内多频段力学性能研究，完成近万线/s超快力曲线高精度测量。项目研究成果对推动AFM技术创新，微纳米操作、快刀伺服等超精密测量和加工装置及相关交叉学科的发展具有重要科学价值和广阔的应用前景。

To achieve deeper mechanical properties characterization, this project focuses on developing the key technologies to address the challenges, which are the limited force bandwidth of Z-axis, insufficient precision for high-frequency loading, and the complex multi-axes dynamic cross-coupling characteristics. This technical research aims to form an ultra-fast and high precision scanning module for “high-speed AFM imaging” and “high-performance mechanical properties characterization”, which starts from the design of a driving-sensing-control integrated system, constructs a self-damping ultra-fast Z-axis control scheme, and finally supplements a multi-axis decoupling control approach. The specific research content includes: (1) Design and integration of the self-sensing ultra-fast Z-axis; (2) Self-damping force control/probe position control schemes for wider frequencies; (3) Robust multi-axis dynamic cross-coupling compensation method; (4) The experimental studies of high-speed AFM imaging and mechanical properties characterization. The expected goals of this project are establishing a comprehensive solution for multiple control parameters calculation in the frequency domain, developing a self-damping ultrafast Z-axis system, proposing a three-axis robust cross-coupling compensation method, and realizing the multi-band mechanical performance investigation and up to 10k lines/s force-displacement curve measurement. The outcomes would boost the innovation and development of AFM, ultra-precision measurement and machining devices such as micro-nano manipulating and fast tool servo, and other interdisciplinary subjects.