RF-MEMS开关动作时电磁特性分析的时域数值算法研究

射频微机电系统(RF-MEMS)开关电磁特性分析的数值算法研究是MEMS计算机辅助分析和设计中的关键课题。RF-MEMS开关的日益快速化和集成化对算法的性能提出了更高的要求。本项目将开展RF-MEMS开关动作时电磁特性分析的时域数值算法研究：以Navier方程和Maxwell-Minkowski方程构建运动开关部件和电磁场相互作用的耦合模型；将时间和空间分阶段离散获得计算模型，使得空间离散误差和时间离散误差互不影响，总体误差易于控制；利用矩阵技术求解计算模型以保证算法的稳定性和高效性；对算法的计算复杂度，误差特性和数值稳定性进行分析；以稳态结果和实测结果对算法进行验证。本项目的研究工作一方面为RF-MEMS的分析设计提供高效可靠的数值仿真工具，节省产品的开发、测试和制造成本，推动MEMS产业发展；另一方面将对计算电磁学在更微观的空间尺度的发展起到推动作用，具有重要的学术价值和应用前景。

The research on numerical algorithm for analysis on electromagnetic characteristics of RF-MEMS switches is a key issue in computer-aided analysis and design of MEMS. With the ever-lasting development of the speed and integration of RF-MEMS switches, the higher-performance algorithm remains in demand. This project will carry out the research on time domain numerical algorithm for analysis on electromagnetic characteristics of operating RF-MEMS switches: build the coupling mathematical model of the interaction between moving switch components and electromagnetic field by using Navier equation and Maxwell Minkowski equation; discretize the time and space in separate stages to obtain the calculation model so that the space discrete error and time discrete error do not affect each other, rendering the overall error easy to control; utilize matrix exponential technique to solve the computation model to ensure the stability and efficiency of the algorithm; analyze the computational complexity, error characteristics and numerical stability of the algorithm; validate the developed algorithm via steady-state results and measured results. On one hand, the work of this project will provide an efficient and reliable numerical simulation tool for RF-MEMS analysis and design, saving the development cost of RF-MEMS switch products and therefore promoting the development of MEMS industry; on the other hand, it will promote the development of computational electromagnetics in the microscopic spatial scale, possessing important academic value and application prospects.