复合表面微织构单晶金刚石车刀超精密切削单晶硅机理研究

单晶硅广泛应用于集成电路、微纳米尺度器件、红外光学系统等领域。然而，由于单晶硅的硬脆性，金刚石单点车削单晶硅时易产生微裂纹和凹坑，且车刀易产生崩刃、沟槽磨损等问题。研究发现合理的复合表面微织构能显著改善刀具切削性能和减缓刀具磨损。据此，本项目拟采用飞秒激光微织构单晶金刚石车刀，提出使用复合表面微织构单晶金刚石车刀超精密切削单晶硅的构想。结合实验观测和和数值方法展开研究：结合实验研究和有限元仿真从宏观尺度探究复合表面微织构对单晶金刚石车刀切削性能的影响机制，揭示复合表面微织构参数对车刀切削性能的影响规律及其机理；运用分子动力学模拟从微纳尺度探究复合表面微织构和刀具切削性能之间的内在关联，揭示复合表面微织构与切屑之间的微观润滑摩擦磨损机理，优化织构参数，为超精密切削技术的发展提供有重要价值的成果，完善织构刀具切削理论，大力促进高效高质量高寿命的绿色切削加工技术的发展。

Single-crystal silicon is widely used in integrated circuits, micro/nanoscale devices, infrared optical systems and other fields. However, due to the hardness and brittleness of single-crystal silicon, micro-cracks and pits are easy to occur when diamond single point turning single-crystal silicon, and the turning tool is prone to crack and groove wear. It is found that reasonable composite surface micro-texture can significantly improve the cutting performance and reduce tool wear. Therefore, this project plans to use femtosecond laser micro texture single crystal diamond turning tool, and put forward the idea of ultra-precision cutting single-crystal silicon with composite surface micro-textured single crystal diamond turning tool. Combined with experimental observation and numerical method, the research is carried out: combined with experimental research and finite element analysis, the influence mechanism of composite surface micro-texture on the cutting performance of single-crystal diamond turning tool is explored from the macro-scale, and the influence rule and mechanism of composite surface micro-texture parameters on the cutting performance of turning tool are revealed; molecular dynamics simulation is used to explore the composite surface micro-texture and tool cutting performance from the micro/nano-scale The internal relationship between cutting performance, reveals the micro lubrication friction and wear mechanism between composite surface micro-texture and chip, optimizes texture parameters, provides valuable results for the development of ultra-precision cutting technology, improves the cutting theory of textured tool, and vigorously promotes the development of green cutting technology with high efficiency, high quality and long life.