气体传感器阵列栅极敏感材料的设计与混合气体分类识别方法研究

栅极敏感型场效应晶体管气体传感器在微型化、在片集成化和智能化等方面相对于传统半导体传感器具有独特优势，是当前传感器领域研究的重要方向之一。栅极敏感材料的高效设计和混合气体的“交叉敏感”，是栅极敏感型场效应晶体管气体传感器发展面临的重要问题。本项目拟从气体分子与金属及金属氧化物表面的相互作用机制出发，分析相互作用的分子轨道和表面态之间的能级匹配、宇称匹配和波函数最大耦合等原则，探索敏感材料对目标气体的选择性吸附准则，建立目标气体的敏感材料数据库，为敏感栅极的高效设计提供理论指导；从气体吸附和脱附速率方程出发，探讨吸附位竞争机制、吸附能差异、气体亲和力等对混合气体吸附速率的影响规律，明晰敏感材料的气体交叉敏感机理，提出传感器阵列分类识别混合气体的理论模型和方法。本项目的实施对栅极敏感型场效应晶体管气体传感器阵列开发及其相关技术发展具有重要意义。

Gas sensors based on gate-sensitive field-effect transistor gas sensors have unique advantages over traditional semiconductor sensors due to the miniaturization, chip integration, and Intelligenzation. It is one of the important directions of current research for gas sensors. The efficient design of sensitive materials for the target gases and the "cross-sensitivity" of mixed gases are important issues for the development of gate-sensitive field-effect transistor gas sensors. This project intends to analyze the principles of match of energy level, parity of the molecular orbitals, and the wave function coupling between molecular orbitals and surface states to understand the interaction mechanism between gas molecules and the surface of metals or metal oxides. We will establish a gas sensitive material database due to the criterions of the selective adsorption criteria for target gas. Our studies will provide theoretical guidance for the efficient design of sensitive materials for gas. For further understand the cross-sensitivity of the mixed gases, we will pay our attention to the effect of the gas coverage, competitive adsorption，the difference of the adsorption energy, the difference of work-function for the surface and electron affinity of the gases on the rate of the gas adsorption and desorption. We would like to put forward a theoretical model for gas sensor array to classify and recognize the Composition and their concentration of mixed gas. The results of our project have important guiding significance for the development of gate-sensitive field-effect transistor gas sensor arrays and the related technologies.