高电负载SAW甲烷传感器关键技术及传感机理研究

克服传统质量敏感型SAW传感器窄量程缺点，提升SAW甲烷传感器的检测量程和响应速度，是该类传感技术迈入工业化应用亟需解决的科学问题。项目提出高电负载的电容型声表面波气体传感器设计方法，引入高导电聚合物材料修饰穴蕃类质量负载型敏感材料，增强敏感膜的电负载效应，通过多层膜结构设计，建立“插指电极/敏感层/顶电极层”电容型传感模型；在高频双通道SAW器件上通过电化学和直流电镀法沉积薄膜，以元件输出频率偏移量和电容为主要指标，利用实验系统在CH4、添加CO、H2S等背景气实验气氛中考察传感器响应特性，获取灵敏度、量程、重复性等传感器关键指标；通过多层膜结构下的气体吸附解吸动力学Gaussian模拟，结合实验结果，阐明质量负载与电负载耦合传感机理。项目研究对推进SAW甲烷传感器的工业化，丰富宽量程SAW气体传感器设计理论及制造方法，具有重要意义。

To overcome the shortcomings of the traditional quality sensitive SAW sensor in narrow range and improve the detection range and response speed of saw methane sensor are the scientific problems that need to be solved in the industrial application of this kind of sensor technology. The design method of capacitance SAW gas sensor with high electrical load is proposed. The high conductivity polymer material will be used to modify the mass loaded sensitive material- cryptophane to enhance the electrical loading effect of the sensitive film. Through the design of multilayer structure, the capacitive sensing model of "interpenetrating electrode / sensing layer / top electrode layer" will be established. Thin films will be deposited on high frequency SAW devices by electrochemical and direct current plating. Taking the output frequency offset and capacitance of the element as the main indexes, the response characteristics of the sensor are investigated in CH4, CO, H2S background gas experimental atmosphere by using the experimental system, and the key indexes of the sensor such as sensitivity, range and repeatability will be obtained. Through the Gaussian simulation of gas adsorption and desorption dynamics in multilayer structure, combined with the experimental results, the coupling sensing mechanism of mass load and electric load is clarified. The project research is of great significance to promote the industrialization of saw methane sensor and enrich the design theory and manufacturing method of wide range SAW gas sensor.