基于VCSEL的特种光束产生机理及微型化技术研究

涡旋光束、贝塞尔光束和艾里光束等特种光束在光通信、微粒操控、量子信息等领域有重要应用，但其产生方法存在激光源、光学系统和相控元件空间分离的缺点，如何实现其微型化、集成化、便携化是亟需解决的问题。本项目提出一种基于垂直腔面发射激光器（VCSEL）的集成式特种光束产生芯片，利用VCSEL平面结构和光束垂直出射的特点，直接在片设计并集成用于产生特种光束的微相控结构，从而实现微型特种光束激光器芯片，可产生不同种类、不同阶次的特种光束。拟采用有限元法和多物理场耦合理论，建立自洽的特种光束集成芯片一体化理论模型，研究VCSEL与集成相控机制的耦合机理，阐明集成芯片的工作机制和集成技术，提出高效、稳定的特种光束芯片结构。研究并揭示VCSEL激射模式与特种光束模式之间的内在联系和规律，设计VCSEL模式选择结构，实现种类、阶次不同的高纯度特种光束，为微型化特种光束激光芯片技术研究与应用建立理论和实验基础。

Special laser beams such as Vortex beam, Bessel beam, and Airy beam have important applications in optical communication, particle manipulation, quantum information and other fields. However, their generation methods have the disadvantage that the laser source, optical system, and phase control elements are separate from each other. How to realize their miniaturization, integration and portability is an urgent problem to be solved. In this project, integrated chips with special laser beam emissions based on vertical cavity surface emitting lasers (VCSELs) are proposed. Using the plane structure and the characteristic of vertical beam emission of VCSEL, micro phase control structures for generating special laser beams are designed and integrated directly on the VCSELs’ surface, so as to realize micro chips that can generate different kinds and orders of special laser beams. A self consistent theoretical model for the integrated chip will be established by using the finite element method and multi-physics coupling theory. The coupling mechanism between VCSEL and integrated phase control structures will also be studied. And the operation principle and integrated technology of the chips will be clarified. Efficient and stable structures for the chips will be proposed. The internal relations and laws between VCSEL lasing modes and special beam modes will be studied and revealed. Structures for mode selection of VCSELs will be designed to realize high-purity special laser beams with different types and orders. This project will provide theoretical and experimental basis for the research and application of miniaturization technology of special laser beam emitted devices.