低压柔性纸张薄膜晶体管及其单器件逻辑调控研究

研制具有极低工作电压和单器件逻辑调控功能的新型信息器件对实现超低功耗电路设计和柔性传感意义特别重大。最近几年，基于电解质/半导体界面离子静电调控和电化学掺杂的多端口薄膜晶体管，作为一类重要的逻辑调控器件，引起了研究人员的广泛关注。在本项目中，为了进一步降低柔性纸张薄膜晶体管的工作电压，申请人将系统研究离子种类、孔径尺寸等对固态电解质双电层效应的影响。另外，申请人将结合微纳器件工艺，通过沉积钝化层来优化纸张衬底表面粗糙度，获得最优化的器件表面界面特性。本项目拟采用溶液法和微纳加工工艺实现p型沟道层的制备，并采用经过双电层效应优化的固态电解质作为器件的栅介质。最后，申请人还将基于多端口协同调控原理探索该类低电压器件在柔性传感领域的应用。

It is of great significance to develop new information devices with ultra-low operating voltage and Single device logic control function for ultra-low power circuit design and flexible sensing. In recent years, as a kind of important logic control devices, multi-terminal thin-film transistors based on electrolyte/semiconductor interface ion electrostatic modulation and electrochemical doping have attracted extensive attention. In order to further reduce the operating voltage of flexible paper thin-film transistors, the applicant will systematically study the influence of ion type and pore size on the double-layer effect of solid electrolyte. In addition, the applicant will combine the micro-nano device process to optimize the surface roughness of the paper substrate by depositing a passivation layer to obtain the optimal interface characteristics of device. In this project, solution method and micro-nano processing technology will be used to realize the preparation of p-type channel layer, and solid electrolyte with optimized double electric layer effect will be used as gate dielectric of device. Finally, based on the principle of multi-terminal synergistic modulation, the application of such low operating voltage devices in the fields of flexible sensing will be investigated.