纳米-微米中间层对膜基系统表界面破坏的影响机制研究

中间层作为薄膜和基底的过渡层，能有效提高微纳米膜/基系统的界面性能，在微电子、传感、表面工程等众多领域有广阔的应用前景。然而，相比传统单层薄膜-软基底系统的研究，人们对含中间层薄膜-软基系统的表、界面力学性能的研究却很少，中间层对界面力学性能的厚度跨尺度效应影响机制尚不清楚。本项目将对软基底上的中间层-薄膜复合结构在外力作用下的表面失稳模式、界面断裂及演化行为进行测试和分析。针对纳米级和微米级不同尺度的中间层厚度，研究其对薄膜/软基系统的表面失效模式、应力传递和界面断裂行为的影响机制。结合力学理论和仿真模拟表征其和传统单层膜基结构的本证异同以及损伤临界参数与中间层薄膜厚度、强度、粘附能和载荷比例的内在关系。这些问题的解决，将为含微纳米尺度中间层膜/基系统元器件的设计和发展提供科学依据，并贡献于光学、微流体系统、生物医学、表面工程等领域。

As a transition layer between the film and substrate, the interlayer can effectively improve the interfacial properties of micro-nano film/substrate system, which has been shown to have many fascinating potential applications in microelectronics, sensing devices as well as surface engineering. Nevertheless, in contrast to the enormous studies on interface mechanical integrity of monolayer-soft substrate, much less has been done to understand effect of interlayer on the deformation and interfacial damage of film/soft substrate, as well as its thickness size effect. Besides, mechanism of size effect on surface and interface failure is still unclear. In this program, instability mode and interface damage evolution of thin film-interlayer composite on soft substrates will be analyzed under external load. In view of different thickness of nano and micro scale interlayers, we will study the effect mechanism on surface failure mode, stress transfer and interface failure behavior of film/soft substrate system. Meanwhile, by mechanics theory and numerical simulation methods, the intrinsic differences and similarities as well as the critical parameters of damage between the interlayer and monolayer structure, will be characterized, to obtain the intrinsic relationship between thickness, strength, adhesion energy of the structure. Solution of the questions will offer scientific basis for the design and development of the interlayer components, also contribute to fields of optics, microfluidic, biomedicine, surface engineering and so on.