面向高性能表面增强拉曼生物传感的AFM机器人一体化加工方法

表面增强拉曼散射(SERS)生物传感技术凭借灵敏、无损性等优点在疾病早期诊断领域受到广泛关注。然而SERS检测存在高灵敏和高重现性之间的互抑矛盾，阻碍SERS器件发展和实际应用。不同于现有仅围绕金属结构改进的加工方法，本申请以二维材料为切入点，利用二维材料与晶向相关的特性制备高比表面积且高密度均匀分布热点的固态复合SERS基底，探索灵敏度和重复性互抑矛盾的解决方法。基于AFM纳米机器人微纳操控平台，研究二维材料与金属结构协同调控的性能提升方法，建立闭环反馈动态控制与同步传输亚表面定位机制，形成二维材料晶向在线检测-晶向调控闭环原位加工-纳米金属结构定向与精准沉积的一体化加工方法，提高复合SERS基底拉曼增强性能、均一性，改善SERS器件灵敏度及信号重现性；制备SERS原型器件，验证所提出方法对解决灵敏度和重现性互抑矛盾、提升器件性能的有效性，促进多学科融合，推动SERS器件的实际应用进程。

Surface enhanced Raman scattering (SERS) biosensor technology has attracted extensive attention in the field of early diagnosis of diseases due to its advantages of sensitivity and non-destructive detecting. However, there is a contradiction between high sensitivity and high reproducibility in SERS detection, which hinders the development and practical application of SERS devices. Different from the existing processing method that only focuses on the improvement of metal structure, the application takes two-dimensional materials as the breakthrough point, and adopts the two-dimensional materials characteristics that related to crystal orientation to prepare solid composite SERS substrate with high specific surface area and high density uniformly distributed hot spots, exploring the solution to the contradiction between sensitivity and repeatability. Based on AFM nanorobot micro-nano manipulation platform, the performance improvement method of collaborative control of two-dimensional materials and metal structures is studied, and the closed-loop feedback dynamic control and synchronous transmission sub-surface positioning mechanism are established. The integrated processing method of two-dimensional materials orientation online detection, orientation control, closed-loop in-situ processing, and precise nano metal structure deposition with target orientation is formed, which can not only improve the Raman enhancement and homogeneity of the composite SERS substrate, but also the sensitivity and signal reproducibility of SERS devices. The prototype SERS devices were fabricated to verify the effectiveness of the proposed method in solving the contradiction between sensitivity and reproducibility, improving device performance, and promoting the practical application process of SERS devices through the multidisciplinary integration.