自驱动集成式硅PIN辐射探测器：键合集成原理与摩擦发电供能机制研究

薄型与厚型硅PIN器件组建的ΔE-E望远镜广泛用于探测辐射种类与能量，其用于外星辐射探测应符合可携带、低能耗、高可靠、低成本、体积小、重量轻的要求，亟需突破集成原理与供能机制。本项目前期制备国际上首个三维集成硅PIN器件，据此提出基于键合的硅PIN辐射探测器集成原理，从而减小封装体积重量、实现KGD键合、提高可靠性、减小信号串扰、加工简单可靠且与IC工艺兼容；另一方面，NASA证明了摩擦纳米发电机(TENG)用于火星的优势，本项目前期联合中科院研发首个基于TENG的自驱动硅PIN光电探测器，据此提出基于TENG的硅PIN辐射探测器自驱动机制，利用TENG收集外界机械能输出高电压驱动硅PIN器件、降低供能成本、提高续航时间且可靠性好；在上述基础上实现自驱动集成式硅PIN辐射探测器性能优化。本项目开创基于键合和摩擦发电的自驱动集成式硅PIN辐射探测器知识体系，为外星用ΔE-E望远镜奠定基础。

The ΔE-E telescopes based on thin and thick silicon PIN devices are widely used for detecting radiation types and particle energy. Its application in alien radiation detection should meet the requirements of portability, low energy consumption, high reliability, low cost, small size and light weight, which poses an urgent need to achieve breakthroughs in integration principles and energy supply mechanisms. We have fabricated the first 3D integrated silicon PIN device in the early stage of this project. Based on this, the integration principle of silicon PIN radiation detector based on bonding is proposed to reduce packaging weight/size, realize KGD bonding, improve reliability and reduce signal cross-talk. The fabrication process is simple, reliable and compatible with IC process. On the other hand, NASA has demonstrated the advantages of triboelectric nanogenerator (TENG) for Mars. We have developed the first self-powered silicon PIN photodetector based on TENG by cooperating with CAS in the early stage of this project. Based on this, the self-powered mechanism of the silicon PIN radiation detector based on TENG is proposed. The TENG is used for harvesting the mechanical energy of the environment and provides high-voltage output for powering silicon PIN device, which reduces the energy supply cost, improves the endurance time with good reliability. On the basis of the above, the optimization of the self-powered integrated silicon PIN Radiation detector is investigated. This project creates a knowledge system of self-powered integrated silicon PIN radiation detectors based on bonding and TENG, laying the foundation for the ΔE-E telescope for alien environment.