基于偏振角分辨光谱分析的超薄膜在线测量方法与理论研究

厚度<100nm的超薄膜凭借出色的物化特性，在量子点显示、太阳能电池等新型半导体产品中发挥着愈加重要的作用。然而由于缺乏有效的在线检测手段，当前超薄膜生产的质量控制手段仍以离线抽检为主，易造成生产良率不足。为此，本项目基于不依赖先验色散模型的角分辨光谱反射架构，通过将反射光度测量与椭偏参量测量相结合以实现二者在测量效率与精度上的优势互补，提出研究一种新型的精准度与效率兼具的偏振角分辨光谱分析法，用于超薄膜在线检测；并着重对其测量精准度、在线测量能力与测量效率的提升等关键技术问题展开研究，力图形成一套切实有效的超薄膜在线测量方法与精度控制理论，并试制出原理样机系统。该方法可有效解决因超薄膜干涉震荡现象弱化、量子尺寸效应凸显，以及受工艺质量影响，导致现有依赖先验色散模型的超薄膜测量方法易产生较大测量误差、测量效率不足的难题。本项目的成功实施，对先进超薄膜半导体制造与检测技术的发展具有重要意义。

By virtue of excellent physical and chemical properties, ultrathin films with thickness less than 100nm play an increasingly important role in new semiconductor products development, such as quantum-dot displays and thin film solar cells. Due the lack of valid in-line inspection methods, however, the current thin film manufacturing still uses off-line sampling-based measurement for quality control, which may easily lead to an insufficient yield. Therefore, a prior dispersion model independent polarized angle-resolved spectral analysis method is proposed for high-accuracy and high-efficiency ultrathin film inline measurement, which is conducted by integrating photometric measurement and ellipsometric measurement into a common angle-resolved spectral reflectometry framework. Through the key technical improvement of measurement accuracy and precision, in-line capability and measurement efficiency, we aim to develop a substantial measurement technique and accuracy control theory for ultrathin film inline measurement, and build up a principle prototype. This method can effectively solve the problem of large measurement errors in the existing prior dispersion model-dependent measurement techniques, due to the weakening of interference oscillation, significant quantum size effect and imperfection of process quality. Successful conduction of this project would provide a significant technical support for the advanced ultrathin film metrology and manufacturing.