面向微纳金属薄膜厚度检测的电涡流传感器多物理场耦合研究

面向微纳制造技术发展，利用电涡流检测方法实现高精度高可靠的微纳金属薄膜厚度检测具有重要的科学意义与工程价值。针对电涡流传感器易受提离高度波动的影响，温度稳定性低以及低电导率金属薄膜厚度检测性能差等瓶颈问题，本项目通过建模仿真、传感器研制和实验研究相结合的方法开展电涡流传感器多物理场耦合研究，旨在阐明电涡流传感器对微纳金属薄膜厚度快速高精度检测机理。主要研究工作包括：（1）建立“电磁场-电路场-温度场”多物理场耦合作用下的电涡流传感器模型，揭示基础参数对厚度灵敏度和提离高度灵敏度的作用规律；（2）自主研制高精度电涡流传感器，提出微小信号处理方法，建立温度补偿机制；（3）研究提离高度波动与环境温度变化对金属薄膜厚度检测性能的影响规律与机理；（4）探究电磁超常材料磁芯对提升电涡流传感器在低电导率金属薄膜厚度检测性能方面的作用规律及其应用性。本项目将为发展电涡流检测技术提供良好的理论支撑。

Oriented to development of micro-nano manufacturing technology, it is of great scientific significance and engineering value to realize micro/nano-scale metal film thickness detection with high precision and reliability by using the eddy current detection method. To solve the bottleneck problem of eddy current sensor, such as low resistance to lift-off distance fluctuation, low temperature stability and poor detection performance to a metal film with low conductivity, a study on the eddy current sensor with multi-physics coupling is carried out by means of model simulation, sensor development and experimental analysis, which aims at revealing the mechanism of micro/nano-scale metal film thickness detection by using eddy current senor with quick response and high precision. The main work includes: (1) creating an eddy current sensor model with multi-physics coupling of “electromagnetic field - circuit field - temperature field”, revealing the effect of basic parameters on thickness sensitivity and lift-off distance sensitivity; (2) independently developing an eddy current sensor with high precision, proposing an efficient small-signal processing method, and establishing a temperature compensation mechanism; (3) studying the influence law of lift-off distance fluctuation and environment temperature variation on the performance of metal film thickness detection; (4) exploring the promotion effect of the magnetic core made by electromagnetic metamaterials on the thickness detection performance of the eddy current sensor to a metal film with low conductivity and its applicability. The project achievements will provide an essential theoretical foundation for further developing the eddy current detection technique.