Free-energy model for bonding in amorphous covalent alloys.
Free-energy model for bonding in amorphous covalent alloys.
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DOI:
10.1103/physrevb.43.4507
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发表时间:
1991-02
期刊:
影响因子:
--
通讯作者:
Yin;Smith
中科院分区:
文献类型:
--
作者:
Yin;Smith
A free-energy model (FEM) for bonding in amorphous covalent alloys is developed and applied to the ternary a-Si x N y H z alloy system. The Gibbs free energy of mixing G M= H M-TS M is obtained with use of the quasichemical approach to the thermodynamics of regular solutions. The enthalpy of mixing, H M, is expressed in terms of the nearest-neighbor bond energies, while the entropy of mixing, S M, is given by the number of possible bonding configurations in Si-centered tetrahedra. Chemical ordering (CO) in these alloys is shown to correspond to the preference for Si-N and Si-H bonds at the expense of Si-Si and NH bonds. The predictions of the FEM are shown to be in good agreement with experimentally determined bond concentrations in a-Si x N y H z alloy films where, in general, neither the CO (T= 0 K) nor random-bonding limits are valid.