Surface evolution models for abrasive slurry jet micro-machining of channels and holes in glass
Surface evolution models for abrasive slurry jet micro-machining of channels and holes in glass
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DOI：
10.1016/j.wear.2013.11.003
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发表时间：
2014-01
期刊：
影响因子：
5
通讯作者：
H. Nouraei;K. Kowsari;J. K. Spelt;M. Papini
中科院分区：
文献类型：
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作者：
H. Nouraei;K. Kowsari;J. K. Spelt;M. Papini
磨料浆料喷射微加工(ASJM)使用磨料浆料喷射来侵蚀具有相对较高分辨率的特征，而不需要图案化掩模。本文研究了表面演化模型对采用新开发的ASJM系统加工的硼硅酸盐玻璃微通道和孔洞轮廓的预测能力。该系统可以产生深度和宽度沿长度变化小于3%的微通道，通道间的重复性在5%以内。使用掺有10和25微米标称直径氧化铝颗粒的低浓度水的浆液，测量了硼硅酸盐玻璃的基本侵蚀速率作为冲击角的函数。这一冲蚀率-冲击角关系被用于以前开发的磨料空气射流微加工脆性材料的现有模型中。结果表明，尽管气基和浆基体系的磨料流型不同，但表面演变模型对微细通道轮廓的预测精度较高，当长宽比(深/宽)小于5时，最大误差为7%；当长宽比接近1时，预测的孔洞轮廓也比较符合，最大误差为14%。
Abrasive slurry jet micro-machining (ASJM) uses a jet of abrasive slurry to erode features with relatively high resolution without the need for a patterned mask. The present study investigated the ability of a surface evolution model to predict the profiles of micro-channels and holes machined in borosilicate glass with a newly developed ASJM system. The system could produce micro-channels with depth and width variations along their length of less than 3%, and a channel-to-channel repeatability within 5%. The fundamental erosion rate of the borosilicate glass was measured as a function of impact angle using a slurry of water mixed with a low concentration of 10 and 25 µm nominal diameter aluminum oxide particles. This erosion rate-impact angle relationship was used in an existing model developed previously for the abrasive air jet micro-machining of brittle materials. The results demonstrated that, despite the differences in abrasive flow patterns between air and slurry based systems, the surface evolution model accurately predicted the profiles of micro-channels with a maximum error of 7% for aspect ratios (depth/width) of up to 5. The predicted profiles of holes were also in reasonable agreement with a maximum error of 14% for aspect ratios close to 1.