Ultra High Thermal Resolution Scanning Probe Microscopy via Carbon Nanotube Tipped Thermal Probes
Ultra High Thermal Resolution Scanning Probe Microscopy via Carbon Nanotube Tipped Thermal Probes
复制标题
通过碳纳米管尖端热探针进行超高热分辨率扫描探针显微镜
DOI：
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发表时间：
2013
期刊：
影响因子：
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通讯作者：
O. Kolosov
中科院分区：
文献类型：
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作者：
P. Tovee;M. Pumarol;M. Rosamond;Robert Jones;M. Petty;D. Zeze;O. Kolosov
我们提出了一种扫描热纳米探针的新概念，它利用碳纳米管（CNT）的极端热导率在探针和样品之间引导热量。 CNT 在扫描热显微镜 (SThM) 中的集成克服了标准 SThM 探针的主要缺点，其中顶点 SThM 探针的低热导率是主要限制因素。 CNT (CNT-SThM) 的集成扩展了 SThM 对金属、半导体和陶瓷等导热率较高的材料中热传输测量的灵敏度，同时还提高了空间分辨率。使用 CNT-SThM 探针对超大规模集成 (ULSI) 互连中的热传输进行研究，显示了陶瓷层中热传输的精细细节，这对于减轻 ULSI 金属电流引线中的电迁移至关重要。对于几层石墨烯，CNT-SThM 探针的热传输灵敏度和空间分辨率表现出明显优于标准 SThM 探针的热分辨率，与标准 SThM 探针的 50-100 nm 相比，实现了 20-30 nm 的形貌和 ~30 nm 的热空间分辨率。 CNT 出色的轴向导热性、高纵横比和坚固性使 CNT-SThM 成为测量纳米级热物理特性的完美热探针，也是下一代热显微镜的绝佳候选者。
We present a new concept of scanning thermal nanoprobe that utilizes the extreme thermal conductance of a carbon nanotube (CNT) to channel heat between the probe and the sample. The integration of CNT in scanning thermal microscopy (SThM) overcomes the main drawbacks of standard SThM probes, where the low thermal conductance of the apex SThM probe is the main limiting factor. The integration of CNT (CNT- SThM) extends SThM sensitivity to thermal transport measurement in higher thermal conductivity materials such as metals, semiconductors and ceramics, while also improving the spatial resolution. Investigation of thermal transport in ultra large scale integration (ULSI) interconnects, using CNT- SThM probe, showed fine details of heat transport in ceramic layer, vital for mitigating electromigration in ULSI metallic current leads. For a few layer graphene, the heat transport sensitivity and spatial resolution of the CNT-SThM probe demonstrated significantly superior thermal resolution compared to that of standard SThM probes achieving 20-30 nm topography and ~30 nm thermal spatial resolution compared to 50-100 nm for standard SThM probes. The outstanding axial thermal conductivity, high aspect ratio and robustness of CNTs can make CNT-SThM the perfect thermal probe for the measurement of nanoscale thermophysical properties and an excellent candidate for the next generation of thermal microscopes.