Fabrication of seamless roller mold with excimer laser direct writing technology
Fabrication of seamless roller mold with excimer laser direct writing technology
复制标题
准分子激光直写技术制造无缝滚轮模具
DOI：
10.1109/nems.2009.5068691
复制
发表时间：
2009
期刊：
影响因子：
--
通讯作者：
Hung
中科院分区：
文献类型：
--
作者：
Y. Lee;Pin;Hung
提出了一种基于激光直写技术的无缝辊模微米级特征的制作方法。在此过程中，玻璃辊首先涂上金属薄膜。高能量脉冲激光直接加工金属薄膜，从而在辊表面上定义图案。随后使用残留金属层作为蚀刻掩模在图案化辊上进行湿法蚀刻，完成无缝玻璃辊模具的制造。将数字图像处理技术引入激光加工过程中，可以成功地转移复杂的图案。实验结果表明，线性光栅和点阵图案的最小特征尺寸可达20 µm。这种方法的优点是：（1）。辊模上的无缝图案，（2）。加工精度好;易于实现复杂的图案，以及（4）.低成本这种方法开辟了许多新的方向和可能性，在应用辊压印连续，大面积，低成本的微结构制造。
This paper presents a new method for fabricating a seamless roller mold with micrometer-scaled features based on laser direct writing approach. In the process, a glass roller is first coated with a metal thin film. A high-energy pulsed laser directly machines the metal thin film and thus defines the pattern on the roller's surface. Subsequent wet etching on the patterned roller using the residual metal layer as the etching mask completes the fabrication of seamless glass roller molds. Digital image processing techniques are incorporated into the laser machining processes so that complicated patterns can be successfully transferred. Experimental results demonstrate a smallest feature size down to 20 µm for both linear grating and dot-array patterns. The advantages of this method are: (1). seamless patterns on roller mold, (2). good machining accuracy, (3). easiness in achieving complicated patterns, and (4). low cost. This method opens up many new directions and possibilities in the applications of roller-imprinting for continuous, large-area, and low-cost fabrication of micro-structures.