Sensitivity analysis of multi-layered C-axis inclined zigzag zinc oxide thin-film resonators as viscosity sensors
Sensitivity analysis of multi-layered C-axis inclined zigzag zinc oxide thin-film resonators as viscosity sensors
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DOI：
10.1109/tuffc.2014.2936
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发表时间：
2014-02
期刊：
影响因子：
--
通讯作者：
Haifeng Zhang;Yuanye Bao
中科院分区：
文献类型：
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作者：
Haifeng Zhang;Yuanye Bao
本文提出了一种新的Z字形C轴倾斜的多层ZnO薄膜体声波谐振器（FBAR）作为粘度传感器监测发动机油和其他液体的润滑性能的理论分析。分析了充液FBAR的自由振动和受迫振动。导出了计算灵敏度所需的方程。数值分析表明，随着层数的增加，绝对灵敏度也增加。研究了C轴倾角、Q值和厚度对灵敏度的影响。研究结果为进一步设计多层FBAR粘度传感器提供了基础。
This paper presents a theoretical analysis of a new zigzag C-axis inclined multi-layer ZnO thin-film bulk acoustic wave resonator (FBAR) as a viscosity sensor to monitor the lubrication performance of engine oil and other liquids. Free vibration and forced vibration for the FBAR loaded with liquids are analyzed. Equations necessary to calculate the sensitivity are derived. The numerical analysis shows that as the number of layers increases, the absolute sensitivity increases as well. The influences on the sensitivity of C-axis inclined angle, Q-factor, and thickness are also investigated. The results provide a foundation for further design of multi-layer FBAR viscosity sensors.