Buried dopant and defect layers for device structures with high-energy ion implantation
Buried dopant and defect layers for device structures with high-energy ion implantation
复制标题
高能离子注入器件结构的埋入掺杂剂和缺陷层
DOI:
10.1016/0168-583x(89)90331-5
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发表时间:
1989
期刊:
影响因子:
--
通讯作者:
H. Wong
中科院分区:
文献类型:
--
作者:
N. Cheung;C. Liang;B. Liew;R. Mutikainen;H. Wong