Study of a Laser Material Processing System with a Fine Optical Setup using a Shrink Fitter
Study of a Laser Material Processing System with a Fine Optical Setup using a Shrink Fitter
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使用热缩机进行精细光学设置的激光材料加工系统的研究
DOI：
10.2493/jspe.72.403
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发表时间：
2006
期刊：
影响因子：
--
通讯作者：
K. Tuchida
中科院分区：
文献类型：
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作者：
S. Nonaka;I. Nitta;A. Kanno;M. Nishimura;Ryosuke Haga;K. Tuchida
为了通过高精度光学系统实现精细加工，我们开发了一种配备检流计扫描仪和使用热缩钳的光学镜头的激光加工系统。热缩钳可防止镜片在高温下错位。因此，即使在高温下，也可以在相当宽的扫描宽度上获得精细的激光光斑。我们使用热缩钳检查了该透镜系统应用于激光加工的可能性。本研究中使用的透镜直径为 160 毫米，因此激光光斑可以在 X 轴和 Y 轴两个方向上扫描 100 毫米的宽度。激光束存在较大的畸变，这是每个透镜固有的，无法通过机械调整来消除，因此我们引入了使用最小二乘法校正光路的公式。最后，我们开发了使用热缩钳的精细激光加工系统。
In order to realize fine processing with a high precision optical system, we have developed a laser processing system with galvanometer scanners and optical lenses using a shrink fitter. The shrink fitter prevents the misalignment of the lenses at the elevated temperature. Therefore fine laser spots can be obtained over the quite wider scanning width, even at elevated temperatures. We examined the possibility of application to laser processing of this lens system using the shrink fitter.Diameters of the lenses used in this study were 160 mm so that the laser spots could be scanned over the width of 100 mm, in both directions of the X-axis and Y-axis. There was large distortion of the laser beam which was inherent to each lenses and can not be removed by mechanical adjustment So we introduced the formula to correct the beam path using the least square method. Finally, we developed the fine laser processing system using shrink fitter.