Path planning and parameter optimization of uniform removal in active feed polishing
Path planning and parameter optimization of uniform removal in active feed polishing
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DOI：
10.1117/1.oe.54.6.065101
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发表时间：
2015-06-01
影响因子：
1.3
通讯作者：
Chen, Huanan
中科院分区：
文献类型：
--
作者：
Liu, Jian;Wang, Shaozhi;Chen, Huanan
短波光学系统要求高质量的超光滑表面。然而，现有的抛光方法难以满足球面或非球面的要求。作为一种新型的小工具抛光方法，主动进给抛光（AFP）虽然会放大残余形状误差或中频误差，但可以使球面元件的表面粗糙度达到0.3nm（RMS）以下。本文的目的是提出一种有效的算法来实现加工过程中曲面的均匀去除。首先介绍了自动抛光机的工作原理和抛光机的工作原理。为了保持加工后的形状误差，提出了一种变螺距螺旋线路径规划算法和停留时间求解模型。为了抑制可能出现的中频误差，分析和评价了由抛光工具底部任意点生成的综合工具轨迹的均匀性，并优化了工具旋转运动与旋转运动的角速度比。最后，在凸球面上进行了实验，得到了超光滑表面。结果表明，该算法可以在保证曲面形状和中频误差小的前提下，获得高质量的超光滑曲面。(C)2015年，美国光电仪器工程师学会（SPIE）
A high-quality ultrasmooth surface is demanded in short-wave optical systems. However, the existing polishing methods have difficulties meeting the requirement on spherical or aspheric surfaces. As a new kind of small tool polishing method, active feed polishing (AFP) could attain a surface roughness of less than 0.3 nm (RMS) on spherical elements, although AFP may magnify the residual figure error or mid-frequency error. The purpose of this work is to propose an effective algorithm to realize uniform removal of the surface in the processing. At first, the principle of the AFP and the mechanism of the polishing machine are introduced. In order to maintain the processed figure error, a variable pitch spiral path planning algorithm and the dwell time-solving model are proposed. For suppressing the possible mid-frequency error, the uniformity of the synthesis tool path, which is generated by an arbitrary point at the polishing tool bottom, is analyzed and evaluated, and the angular velocity ratio of the tool spinning motion to the revolution motion is optimized. Finally, an experiment is conducted on a convex spherical surface and an ultrasmooth surface is finally acquired. In conclusion, a high-quality ultrasmooth surface can be successfully obtained with little degradation of the figure and mid-frequency errors by the algorithm. (C) 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)