Bulk synthesis of a-SixNyH and a-SixOy straight and coiled nanowires
Bulk synthesis of a-SixNyH and a-SixOy straight and coiled nanowires
复制标题
a-SixNyH 和 a-SixOy 直线和卷曲纳米线的批量合成
DOI：
10.1039/b311887h
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发表时间：
2004
期刊：
影响因子：
--
通讯作者：
G. Bhimarasetti
中科院分区：
文献类型：
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作者：
M. Sunkara;Shashank Sharma;H. Chandrasekaran;M. Talbott;K. Krogman;G. Bhimarasetti
本文报道了用熔融镓池作为溶剂介质和分别由氮硅烷和氧硅烷组成的微波等离子体合成氢化、无定形的SixNy和SixOy纳米线。高密度的多纳米线在熔融镓池中成核生长。得到的纳米线直径为几十纳米，长度为几十微米。电子能量损失谱（EELS）和傅里叶变换红外光谱（FTIR）表明，氮化硅纳米线是氢化的非晶氮化硅（a-SixNyH）。能量色散x射线能谱（EDS）结果显示，氮化硅（Si3N4）和二氧化硅（SiO2）的N∶Si和O∶Si比小于化学计量组成。化学稳定性和折射率（RI）测量的研究表明，a-SixNyH纳米线是纳米级光刻中的蚀刻掩模和光学涂层中的高折射率材料的潜在候选者。
We report the bulk synthesis of hydrogenated, amorphous SixNy and SixOy nanowires using pools of molten gallium as the solvent medium and microwave plasma consisting of silane in nitrogen and silane in oxygen respectively. High densities of multiple nanowires nucleated and grew from molten gallium pools. The resulting nanowires were tens of nanometers in diameter and tens of microns long. Electron energy loss spectroscopy (EELS) and Fourier transform infra-red (FTIR) spectroscopy showed that the silicon nitride nanowires are hydrogenated amorphous silicon nitride (a-SixNyH). The results of energy dispersive X-ray spectroscopy (EDS) yielded N ∶ Si and O ∶ Si ratios less than the stoichiometric composition of silicon nitride (Si3N4) and silica (SiO2). Studies on the chemical stability and refractive index (RI) measurements demonstrate a-SixNyH nanowires are potential candidates for use as etching masks in nanoscale lithography, and as high index materials in optical coatings.