Laser Ablative Processes – Macro- and Micromachining

Laser Ablative Processes – Macro- and Micromachining
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激光烧蚀工艺 – 宏观和微观加工

DOI:
10.1007/978-1-84996-062-5_9
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发表时间:
2010
期刊:
影响因子:
--
通讯作者:
J. Mazumder
J. Mazumder
中科院分区:
--
文献类型:
--
作者:
W. Steen;J. Mazumder

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最近,随着功率巨大但能量很小的超强超短激光脉冲的引入,对烧蚀过程的兴趣变得很重要。这种脉冲可以以材料只能通过蒸发或飞散吸收的速率传递能量。因此,材料被去除,留下非常少的热影响材料。这些激光器已经成为一种不可钝的机床,可以在非常精细的结构上操作,造成非常小的化学或机械损伤。
The interest in ablation as a process has recently become important with the introduction of very powerful, ultrashort laser pulses of immense power but little energy. Such pulses can deliver energy at a rate that the material can only absorb by evaporating or flying apart. Thus, material is removed leaving very little heat-affected material. These lasers have become a form of unbluntable machine tool, which can operate on very fine structures causing very little chemical or mechanical damage.