Methods for determining and processing 3D errors and uncertainties for AFM data analysis
Methods for determining and processing 3D errors and uncertainties for AFM data analysis
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DOI：
10.1088/0957-0233/22/2/025501
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发表时间：
2011-02-01
影响因子：
2.4
通讯作者：
Koenders, L.
中科院分区：
文献类型：
--
作者：
Klapetek, P.;Necas, D.;Koenders, L.
本文介绍了三维（3D）扫描探针显微镜（SPM）数据的处理。结果表明，三维体积校准误差和不确定度数据，可以获得两个原子力显微镜系统和商业SPM。这些数据可以在几乎所有标准SPM数据处理算法中使用，以确定扫描系统的不确定性的局部值。如果针对SPM的整个测量体积确定扫描系统的误差函数，则可以将其转换为产生局部尺寸不确定性值，该局部尺寸不确定性值又可以用于评估与所获取的数据相关的不确定性以及用于直接或统计测量中的进一步数据处理应用（例如面积、ACF、粗糙度）。这些都已在软件包Gwendedion中实现。
This paper describes the processing of three-dimensional (3D) scanning probe microscopy (SPM) data. It is shown that 3D volumetric calibration error and uncertainty data can be acquired for both metrological atomic force microscope systems and commercial SPMs. These data can be used within nearly all the standard SPM data processing algorithms to determine local values of uncertainty of the scanning system. If the error function of the scanning system is determined for the whole measurement volume of an SPM, it can be converted to yield local dimensional uncertainty values that can in turn be used for evaluation of uncertainties related to the acquired data and for further data processing applications (e.g. area, ACF, roughness) within direct or statistical measurements. These have been implemented in the software package Gwyddion.