Surface and interface roughness estimations by X‐ray reflectivity and RBS measurements
Surface and interface roughness estimations by X‐ray reflectivity and RBS measurements
复制标题
通过 X 射线反射率和 RBS 测量估算表面和界面粗糙度
DOI：
10.1002/sia.5644
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发表时间：
2014
影响因子：
1.7
通讯作者：
K. Kimura
中科院分区：
文献类型：
--
作者：
Y. Fujii;K. Nakajima;M. Suzuki;K. Kimura
X射线反射率（XRR）常用于估算界面粗糙度。原则上，XRR可以同时测量表面和界面粗糙度。但与表面粗糙度相比，对界面粗糙度的敏感性较差。为了提高界面粗糙度的精度，将XRR与高分辨率卢瑟福后向散射光谱相结合进行分析。测定了表面和界面粗糙度，从而可以再现XRR和高分辨率卢瑟福后向散射光谱。我们还发现XRR测量的有效粗糙度可能与入射角有关。这是因为粗糙度取决于探测区域的大小。版权所有©2014 John Wiley & Sons， Ltd。
X‐ray reflectivity (XRR) is often used to estimate the interface roughness. In principle, XRR can measure both surface and interface roughness. However, the sensitivity to the interface roughness is rather poor compared with the surface roughness. In order to improve the accuracy in the interface roughness, a combination analysis of XRR with high‐resolution Rutherford backscattering spectroscopy was performed. The surface and interface roughness were determined so that both XRR and high‐resolution Rutherford backscattering spectroscopy spectra can be reproduced. We also found that the effective roughness measured by XRR may depend on the angle of incidence. This is because the roughness depends on the size of the probing area. Copyright © 2014 John Wiley & Sons, Ltd.