Optical Transduction for Vertical Nanowire Resonators
Optical Transduction for Vertical Nanowire Resonators
复制标题
DOI：
10.1021/acs.nanolett.9b04909
复制
发表时间：
2020-04-08
期刊：
影响因子：
10.8
通讯作者：
Calleja, Montserrat
中科院分区：
文献类型：
--
作者：
Molina, Juan;Ramos, Daniel;Calleja, Montserrat
我们描述了一种光学转换机制，以测量弯曲模式振动的垂直排列的纳米线在一个平面基板上具有高灵敏度，线性度，易于实施。我们证明，当激光束平行于纳米线照射时，从衬底反射的光与它们的振动成比例地调制，因此测量这种调制提供了高效的共振读出。该机制适用于单个纳米线或阵列，而不需要关于其几何形状或阵列图案的特定要求，并且除了纳米线生成之外不需要制造工艺。我们展示了如何优化这种机制的性能，其特征在于分裂弯曲模式的垂直硅纳米线在其全动态范围和第五模式顺序。所提出的转导方法是相关的纳米线谐振器的任何应用，特别是用于集成纳米机械传感在功能基板的基础上垂直纳米线的生物应用。
We describe an optical transduction mechanism to measure the flexural mode vibrations of vertically aligned nanowires on a flat substrate with high sensitivity, linearity, and ease of implementation. We demonstrate that the light reflected from the substrate when a laser beam strikes it parallel to the nanowires is modulated proportionally to their vibration, so that measuring such modulation provides a highly efficient resonance readout. This mechanism is applicable to single nanowires or arrays without specific requirements regarding their geometry or array pattern, and no fabrication process besides the nanowire generation is required. We show how to optimize the performance of this mechanism by characterizing the split flexural modes of vertical silicon nanowires in their full dynamic range and up to the fifth mode order. The presented transduction approach is relevant for any application of nanowire resonators, particularly for integrating nanomechanical sensing in functional substrates based on vertical nanowires for biological applications.