A qualitative analysis of designs of micromachined electromagnetic inductive contactless suspension
A qualitative analysis of designs of micromachined electromagnetic inductive contactless suspension
复制标题
微机械电磁感应非接触悬架设计的定性分析
DOI：
10.1016/j.ijmecsci.2014.03.013
复制
发表时间：
2014
影响因子：
7.3
通讯作者：
U. Wallrabe
中科院分区：
文献类型：
--
作者：
K. Poletkin;A. Chernomorsky;C. Shearwood;U. Wallrabe
本文提出了一种定性分析的方法来研究微机械电磁感应无接触悬浮（MIS）的设计。的分析方法是基于广义简化的线性模型的MIS，它描述了在空间中的悬浮盘形的验证质量的动力学，在平衡点附近。检测质量块悬浮在由环形线圈产生的电磁场中。该模型使我们能够表达的动态参数的悬架，并获得其稳定性的条件分析。在所开发的方法的框架中，我们提出了一种新的三维设计的悬挂系统，具有显着增加的横向刚度。
This article presents a qualitative analytical approach to the study of designs of Micromachined electromagnetic Inductive contactless Suspension (MIS). The analytical approach is developed based on the generalized reduced linear model of the MIS, which describes the dynamics of a levitated disk shaped proof mass in space, near an equilibrium point. The proof mass is levitated in an electromagnetic field created by a ring shaped coil. The model allows us to express the dynamical parameters of the suspension and obtain the condition of its stability analytically. In the framework of the developed approach, we propose a new 3D design of the suspension with significantly increased lateral stiffness.