Ultra-precision grinding of AlON ceramics: surface finish and mechanisms
Ultra-precision grinding of AlON ceramics: surface finish and mechanisms
复制标题
AlON 陶瓷的超精密磨削：表面光洁度和机理
DOI：
10.1016/j.jeurceramsoc.2019.05.005
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发表时间：
2019
影响因子：
5.7
通讯作者：
Jian Zhang
中科院分区：
文献类型：
--
作者：
Chunyu Zhang;Bing Guo;Qingliang Zhao;Han Liu;Jinhu Wang;Jian Zhang
氮氧化铝（AlON）可以通过超精密磨削进行有效的表面加工。在这项工作中，超精密磨削实验进行了AlON的表面特性和材料去除机制进行了研究。由于材料去除方式的不同，磨削表面呈现出不均匀的形貌。采用掠入射X射线衍射（GIXRD）、纳米压痕和电子背散射衍射（EBSD）等方法对AlON的微观结构进行了研究。结果表明，材料的微观力学性能随表面晶粒取向而变化。孪晶中磨粒表面形貌一致，但随晶粒取向而变化。通过比较加工尺寸与晶粒尺寸的关系，提出了在超精密磨削加工中应考虑单个晶粒的材料去除方式。在此基础上，提出了一个简单的理论模型来解释超精密磨削AlON材料的去除机理。
Aluminum oxynitride (AlON) can be effectively finished by ultra-precision grinding. In this work, the ultra-precision grinding experiment was conducted on AlON to investigate surface characteristics and material removal mechanism. The ground surface has an unusual non-uniform morphology resulted from the different material removal modes. Grazing incidence X-ray diffraction (GIXRD), nanoindentation and Electron Back-Scattered Diffraction (EBSD) were carried out to study the micro-properties of AlON. The results revealed that the micro mechanical properties vary with the grain orientation on the surface. The morphologies of ground surface are consistent in the twinned grains and change with the grain orientation. By comparing the relationship of machining size and grain size, the material removal modes of individual grains should be taken into consideration during ultra-precision grinding. Based on this, a simple theoretical model was proposed to explain the material removal mechanism of AlON under ultra-precision grinding.