Visualization of electrons and holes localized in the thin gate film of metal SiO_2-Si_3N_4-SiO_2 semiconductor type Flash memory using scanning nonlinear dielectric microscopy after weiting-erasing cycling
Visualization of electrons and holes localized in the thin gate film of metal SiO_2-Si_3N_4-SiO_2 semiconductor type Flash memory using scanning nonlinear dielectric microscopy after weiting-erasing cycling
复制标题
在微擦除循环后使用扫描非线性介电显微镜观察金属 SiO_2-Si_3N_4-SiO_2 半导体型闪存薄栅膜中电子和空穴的可视化
DOI:
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发表时间:
2005
期刊:
影响因子:
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通讯作者:
Koichiro Honda
中科院分区:
文献类型:
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作者:
K.Omae;Y.Kawakami;S.Fujita;Y.Narukawa;T.Mukai;宮崎誠一;Koichiro Honda
影响因子:
1.5
作者:
H. Odagawa;Yasuo Cho
通讯作者:
Yasuo Cho