Design and Fabrication of a Four-Arm-Structure MEMS Gripper
Design and Fabrication of a Four-Arm-Structure MEMS Gripper
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DOI：
10.1109/tie.2008.2005147
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发表时间：
2009-04-01
影响因子：
7.7
通讯作者：
Li, Xinxin
中科院分区：
文献类型：
--
作者：
Chen, Tao;Chen, Liguo;Li, Xinxin
本文重点研究了集成侧壁压阻力传感器的四臂结构微机电系统夹具的设计和制造。采用表面和体微加工技术从单晶硅晶圆（即不使用绝缘体上硅晶圆）制造微夹具。采用垂直侧壁表面压敏电阻蚀刻技术来形成侧向力传感器。该夹具的末端执行器为四臂结构：两个集成压阻传感器的固定悬臂设计用于感测抓取力。力传感器的分辨率在微牛顿范围内，因此提供主导微操作过程的力的反馈。静电驱动的微执行器旨在提供操作其他两个可移动臂的力。这样，在臂尖处产生25μm的偏转，操作范围为30-130μm。实验结果表明，它可以成功提供力传感，并在微操作和微装配任务中防止微零件损坏方面发挥主要作用。
This paper is focused on the design and fabrication of a four-arm-structure microelectromechanical systems gripper integrated with sidewall piezoresistive force sensors. Surface and bulk micromachining technologies are employed to fabricate the microgripper from a single-crystal silicon wafer (i.e., no silicon-on-insulator wafer is used). A vertical sidewall surface piezoresistor etching technique is used to form the side direction force sensors. The end effector of this gripper is a four-arm structure: two fixed cantilever arms integrated with piezoresistive sensors are designed to sense the gripping force. The resolution of the force sensor is in the micronewton range and, therefore, provides feedback of the forces that dominate the micromanipulation processes. An electrostatically driven microactuator is designed to provide the force to operate the other two movable arms. In this way, it creates a deflection of 25 mu m at the arm tip, and the range of the operation is 30-130 mu m. Experimental results show that it can successfully provide force sensing and play a main role in preventing the damage of microparts in micromanipulation and microassembly tasks.