MEMS flow sensors for nano-fluidic applications
MEMS flow sensors for nano-fluidic applications
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DOI：
10.1016/s0924-4247(00)00541-0
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发表时间：
2001-03-20
影响因子：
4.6
通讯作者：
Tai, YC
中科院分区：
文献类型：
--
作者：
Wu, SY;Lin, Q;Tai, YC
本文介绍了用于测量毫升/分钟范围内液体流速的微机械热传感器。传感器使用嵌入在微通道氮化硅壁中的掺硼多晶硅薄膜加热器。选择硼掺杂可以提高加热器在可容忍噪声范围内的电阻温度系数，并将微通道悬挂在衬底上以提高热隔离。该传感器的流速分辨率为0.4 nl/min，并且能够检测液体中的微气泡。本文还进行了传热模拟，以解释传感器的工作原理，结果与实验数据非常吻合。(C) 2001 Elsevier Science B.V.版权所有
This paper presents micromachined thermal sensors for measuring liquid flow rates in the nanoliter-per-minute range. The sensors use a boron-doped polysilicon thin-film heater that is embedded in the silicon nitride wall of a microchannel. The boron doping is chosen to increase the heater's temperature coefficient of resistance within tolerable noise limits, and the microchannel is suspended from the substrate to improve thermal isolation. The sensors have demonstrated a flow rate resolution of 0.4 nl/min, as well as the capability for detecting micro bubbles in the liquid. Heat transfer simulation has also been performed to explain the sensor operation and yielded excellent agreement with experimental data. (C) 2001 Elsevier Science B.V. All rights reserved.