Pyroelectric thin-film sensor array
Pyroelectric thin-film sensor array
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DOI：
10.1016/s0924-4247(97)01484-2
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发表时间：
1997-05-01
影响因子：
4.6
通讯作者：
Ryser, P
中科院分区：
文献类型：
--
作者：
Kohli, M;Wuethrich, C;Ryser, P
制备了热释电薄膜点探测器和1×12阵列，并对其进行了表征。它们由溶胶-凝胶法在微机械Si3N4/SiO_2薄膜上沉积的PZT薄膜组成。测量的电流和电压响应随1×12阵元调制频率的变化与有限元计算结果进行了比较。对于0.4 mm×0.9 mm的元件，在真空中获得了近3000 V W-1的电压响应度，在空气中达到了800 V W-1的电压响应度。对一些点探测器进行了完整的封装，并演示了在运动检测系统中的正确操作。
Pyroelectric thin-film point detectors and 1 x 12 arrays have been fabricated and characterized. They consist of sol-gel-deposited PZT thin-film elements on micromachined Si3N4/SiO2 membranes. The measured current and voltage response as a function of modulation frequency of a 1 x 12 array element is compared with finite-element calculations. Voltage responsivities of almost 3000 V W-1 in vacuum and 800 V W-1 in air have been achieved for 0.4 mm x 0.9 mm elements. Some point detectors have been completely packaged and correct operation in a movement detection system has been demonstrated.