Lithium niobate on insulator (LNOI) for micro-photonic devices
Lithium niobate on insulator (LNOI) for micro-photonic devices
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DOI：
10.1002/lpor.201100035
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发表时间：
2012-07-01
影响因子：
11
通讯作者：
Guenter, Peter
中科院分区：
文献类型：
--
作者：
Poberaj, Gorazd;Hu, Hui;Guenter, Peter
综述了高折射率对比度单晶铌酸锂薄膜作为高密度集成光学新平台的研究进展。采用离子切片法制备了亚微米LiNbO_3薄膜。它们可以通过两种不同的技术键合到低折射率衬底上，以获得“绝缘体上的锂氧化物”（LNOI），即使是3直径的晶片。不同的微米和纳米结构化技术已被用于成功地开发微型光子器件。具体地说，描述了横截面小于1 μ m（2）的LNOI光子线、用于二次谐波产生的周期性极化LNOI光子线、电光可调谐微谐振器、用于混合集成的独立微环以及光子晶体结构的制造和表征。
The state-of-the-art of high-refractive-index-contrast single-crystalline thin lithium niobate (LiNbO3) films as a new platform for high-density integrated optics is reviewed. Sub-micrometer thin LiNbO3 films are obtained by "ion-slicing". They can be bonded by two different techniques to a low-index substrate to obtain "lithium niobate on insulator" (LNOI) even as wafer of 3 diameter. Different micro-and nano-structuring techniques have been used to successfully develop micro-photonic devices. To be specific, the fabrication and characterization of LNOI photonic wires with cross-section < 1 mu m(2), periodically poled LNOI photonic wires for second harmonic generation, electro-optically tunable microring resonators, free standing microrings for hybrid integration, and photonic crystal structures are described.