Decomposition of fluorocarbon gaseous contaminants by surface discharge induced plasma chemical processing
Decomposition of fluorocarbon gaseous contaminants by surface discharge induced plasma chemical processing
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通过表面放电诱导等离子体化学处理分解碳氟化合物气态污染物
DOI：
10.1109/28.231995
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发表时间：
1991
期刊：
影响因子：
--
通讯作者：
S. Masuda
中科院分区：
文献类型：
--
作者：
T. Oda;T. Takahashi;H. Nakano;S. Masuda
采用表面放电诱导等离子体化学处理（SPCP）技术，在氧化铝基圆柱形反应器中嵌入接地电极和条形表面金属电极，对空气、氮气和氧气中的氯氟烃（CFCs）污染物进行了表面放电诱导等离子体化学处理。对于100或1 000 ppm的氟氯化碳-113，观察到的分解率非常高，超过99%。发现需要更大的电力来分解化学稳定的碳氟化合物，但在不久的将来有可能进一步大幅提高效率。作者认为，该系统将是有效的，大量分解稀氟碳化合物。<<ETX>>
Surface discharge induced plasma chemical processing (SPCP) using a high-grade alumina-based cylindrical reactor with an embedded ground electrode and stripe-shaped surface metal electrodes was applied to decompose chlorofluorocarbon contaminants in air, nitrogen, and oxygen. A very high decomposition rate, more than 99%, was observed for 100 or 1000 p.p.m. CFC-113. Greater electric power is found to be necessary to decompose the chemically stable fluorocarbon, but a substantial further improvement of efficiency will be possible in the near future. The authors feel that this system will be effective to decompose dilute fluorocarbon in large quantities.<<ETX>>