FRICTION AND WEAR OF PLASMA-DEPOSITED DIAMOND FILMS
FRICTION AND WEAR OF PLASMA-DEPOSITED DIAMOND FILMS
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DOI：
10.1063/1.354386
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发表时间：
1993-10-01
影响因子：
3.2
通讯作者：
JACKSON, HE
中科院分区：
文献类型：
--
作者：
MIYOSHI, K;WU, RLC;JACKSON, HE
采用微波等离子体沉积金刚石薄膜，在湿空气和干氮气中进行了往复滑动摩擦实验，在真空中进行了单向滑动摩擦实验。采用微波等离子体辅助化学气相沉积法制备了表面粗糙度为15 ~ 160 nm的金刚石薄膜。在潮湿的空气和干燥的氮气中，当金刚石针在金刚石膜的表面上制作凹槽时发生磨损，因此，初始摩擦系数随着初始表面粗糙度的增加而增加。平衡摩擦系数与金刚石膜的初始表面粗糙度无关。在真空条件下，金刚石薄膜与金刚石针接触时的摩擦力主要来源于滑动表面之间的粘附力。在这些情况下，初始和平衡摩擦系数是独立的金刚石膜的初始表面粗糙度。平衡摩擦系数在湿空气和干氮气中为0.02-0.04，而在真空中为1.5-1.8。金刚石薄膜的磨损因子取决于初始表面粗糙度，而与环境无关，它随着初始表面粗糙度的增加而增加。真空中的磨损系数明显高于潮湿空气和干燥氮气中的磨损系数。
Reciprocating sliding friction experiments in humid air and in dry nitrogen and unidirectional sliding friction experiments in ultrahigh vacuum were conducted with a natural diamond pin in contact with microwave-plasma-deposited diamond films. Diamond films with a surface roughness (R rms) ranging from 15 to 160 nm were produced by microwave-plasma-assisted chemical vapor deposition. In humid air and in dry nitrogen, abrasion occurred when the diamond pin made grooves in the surfaces of diamond films, and thus, the initial coefficients of friction increased with increasing initial surface roughness. The equilibrium coefficients of friction were independent of the initial surface roughness of the diamond films. In vacuum the friction for diamond films contacting a diamond pin arose primarily from adhesion between the sliding surfaces. In these cases, the initial and equilibrium coefficients of friction were independent of the initial surface roughness of the diamond films. The equilibrium coefficients of friction were 0.02-0.04 in humid air and in dry nitrogen, but 1.5-1.8 in vacuum. The wear factor of the diamond films depended on the initial surface roughness, regardless of environment; it increased with increasing initial surface roughness. The wear factors were considerably higher in vacuum than in humid air and in dry nitrogen.