Deposition of iron nanoparticles onto multiwalled carbon nanotubes by helicon plasma-enhanced, chemical vapor deposition

Deposition of iron nanoparticles onto multiwalled carbon nanotubes by helicon plasma-enhanced, chemical vapor deposition
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DOI:
10.1016/j.jnoncrysol.2007.01.008
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发表时间:
2007-05
影响因子:
3.5
通讯作者:
O. Yoon;Sung Min Kang;S. M. Moon;J. Jung;I. Choi;K. Yoon
O. Yoon;Sung Min Kang;S. M. Moon;J. Jung;I. Choi;K. Yoon
中科院分区:
材料科学2区
文献类型:
--
作者:
O. Yoon;Sung Min Kang;S. M. Moon;J. Jung;I. Choi;K. Yoon

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We report helicon plasma-enhanced, chemical vapor deposition (helicon-PECVD) of iron (Fe) nanoparticles onto multiwalled carbon nanotubes (MWCNTs) with ferrocene as an iron source. Ferrocene was evaporated from the bubbler by heating, and the helicon plasma treatment was performed with the evaporated ferrocene and hydrogen gas at (−)DC bias voltage. The resulting MWCNT/Fe nanoparticle hybrids were characterized by X-ray fluorescence spectroscopy, X-ray diffraction spectroscopy, field-emission scanning electron microscopy, transmission electron microscopy, micro-Raman spectroscopy, and superconducting quantum interference device magnetometry.