MEMS-based VCSEL beam steering using replicated polymer diffractive lens
MEMS-based VCSEL beam steering using replicated polymer diffractive lens
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DOI：
10.1016/j.sna.2006.12.015
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发表时间：
2008-03
影响因子：
4.6
通讯作者：
K. Hedsten;Jonas Melin;J. Bengtsson;P. Modh;D. Karlén;B. Löfving;Richard Nilsson;H. Rödjegård;K. Persson;P. Enoksson;F. Nikolajeff;G. Andersson
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文献类型：
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作者：
K. Hedsten;Jonas Melin;J. Bengtsson;P. Modh;D. Karlén;B. Löfving;Richard Nilsson;H. Rödjegård;K. Persson;P. Enoksson;F. Nikolajeff;G. Andersson
本文介绍了一种全集成微光学系统，该系统通过在光路中横向移动准直衍射透镜来实现垂直腔面发射激光器（VCSEL）光束的动态角度控制，准直衍射透镜安装在一个可平移的硅平台上，该平台由一个具有开口的框架和静电驱动的梳状致动器组成，由此实现横向运动。实现一维（1D）和二维（2D）扫描的设备已经制造和评估。集成的透镜上的可平移的硅阶段是使用一种新开发的制造工艺的基础上热压的无定形氟碳聚合物。该制造过程依赖于逆序协议，其中光学元件的结构化先于硅微结构化。组装和封装的VCSEL MOEMS系统，使用低温共烧陶瓷（LTCC）技术，也证明了。系统和光束转向功能的光学评估显示，对于相对低的驱动电压（1070V），显著的光束偏转。
This paper describes a fully integrated micro-optical system, in which dynamic angular control of the beam from a vertical cavity surface emitting laser (VCSEL) is realized by laterally moving a collimating diffractive lens in the light path. The lens is mounted on a translatable silicon stage, which consists of a frame with an opening for the light to traverse the lens and electro-statically driven comb actuators, by which the lateral movement is achieved. Devices implementing both one- (1D) and two-dimensional (2D) scanning have been fabricated and evaluated. Integration of the lens onto the translatable silicon stage is done using a newly developed fabrication process based on hot embossing of an amorphous fluorocarbon polymer. This fabrication process relies on a reversed-order protocol, where the structuring of the optical element precedes the silicon microstructuring. Assembly and packaging of the VCSEL-MOEMS system, using low temperature cofired ceramic (LTCC) technique, is also demonstrated. Optical evaluation of the system and beam steering function shows significant beam deflection for a relatively low driving voltage (∼70V).