Is collisionless heating in capacitively coupled plasmas really collisionless?
Is collisionless heating in capacitively coupled plasmas really collisionless?
复制标题
电容耦合等离子体中的无碰撞加热真的是无碰撞吗？
DOI：
10.1088/0963-0252/24/4/044002
复制
发表时间：
2015
影响因子：
3.8
通讯作者：
P. Chabert
中科院分区：
文献类型：
--
作者：
T. Lafleur;P. Chabert
通过执行测试粒子和粒子在电池中的模拟组合，我们研究了单频电容耦合等离子体（ccp）中的电子加热。与之前Kaganovich等人（1996年苹果）强调的理论考虑一致。理论物理。Lett. 69 3818)，我们表明典型ccp的真正无碰撞/随机加热水平明显小于碰撞相互作用的水平；即使在很低的压力和很宽的间隙长度下。从根本上说，电子加热是一种碰撞现象，粒子碰撞提供了产生局部（或欧姆）加热成分和非局部（或混合）加热成分所需的重要相位随机化和随机化机制。
By performing a combination of test-particle and particle-in-cell simulations, we investigate electron heating in single frequency capacitively coupled plasmas (CCPs). In agreement with previous theoretical considerations highlighted in Kaganovich et al (1996 Appl. Phys. Lett. 69 3818), we show that the level of true collisionless/stochastic heating in typical CCPs is significantly smaller than that due to collisional interactions; even at very low pressures and wide gap lengths. Fundamentally electron heating is a collisional phenomenon whereby particle collisions provide the vital phase randomization and stochastization mechanism needed to generate both a local (or ohmic) heating component, and a non-local (or hybrid) heating component.
影响因子：
2.2
作者：
M. Turner;A. Derzsi;Z. Donkó;D. Eremin;S. Kelly;T. Lafleur;T. Mussenbrock
通讯作者：
M. Turner;A. Derzsi;Z. Donkó;D. Eremin;S. Kelly;T. Lafleur;T. Mussenbrock